JPH02144744U - - Google Patents
Info
- Publication number
- JPH02144744U JPH02144744U JP5355889U JP5355889U JPH02144744U JP H02144744 U JPH02144744 U JP H02144744U JP 5355889 U JP5355889 U JP 5355889U JP 5355889 U JP5355889 U JP 5355889U JP H02144744 U JPH02144744 U JP H02144744U
- Authority
- JP
- Japan
- Prior art keywords
- sensitive diaphragm
- pressure
- metal container
- diaphragm chip
- silicon pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5355889U JPH02144744U (en]) | 1989-05-10 | 1989-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5355889U JPH02144744U (en]) | 1989-05-10 | 1989-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02144744U true JPH02144744U (en]) | 1990-12-07 |
Family
ID=31574849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5355889U Pending JPH02144744U (en]) | 1989-05-10 | 1989-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02144744U (en]) |
-
1989
- 1989-05-10 JP JP5355889U patent/JPH02144744U/ja active Pending